Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810987 | Substrate treatment method, computer storage medium and substrate treatment system | Makoto Muramatsu, Takahiro Kitano, Takanori Nishi, Shinichiro KAWAKAMI, Takashi Yamauchi | 2017-11-07 |
| 9748101 | Substrate treatment method, computer storage medium, and substrate treatment system | Makoto Muramatsu, Takahiro Kitano, Keiji Tanouchi, Soichiro Okada | 2017-08-29 |
| 9741583 | Substrate treatment method, computer readable storage medium and substrate treatment system | Makoto Muramatsu, Takahiro Kitano, Gen You, Takanori Nishi | 2017-08-22 |
| 9618849 | Pattern forming method, pattern forming apparatus, and computer readable storage medium | Makoto Muramatsu, Takahiro Kitano, Keiji Tanouchi | 2017-04-11 |