Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741583 | Substrate treatment method, computer readable storage medium and substrate treatment system | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita, Takanori Nishi | 2017-08-22 |
| 9662685 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Gentaro Goshi, Kazuyuki Mitsuoka, Hiroki Ohno, Takehiko Orii, Takayuki Toshima | 2017-05-30 |
| 9583330 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato +5 more | 2017-02-28 |