Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9583330 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato, Takayuki Toshima +5 more | 2017-02-28 |
| 9570286 | Supercritical drying method for semiconductor substrate | Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Hidekazu Hayashi | 2017-02-14 |