Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673217 | Semiconductor device and method for manufacturing same | Atsuko Sakata, Yohei Sato, Yasuhito Yoshimizu, Satoshi Wakatsuki, Takeshi Ishizaki +8 more | 2017-06-06 |
| 9583330 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Yohei Sato, Takayuki Toshima +5 more | 2017-02-28 |
| 9570286 | Supercritical drying method for semiconductor substrate | Yohei Sato, Hiroshi Tomita, Hidekazu Hayashi, Linan Ji | 2017-02-14 |