Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810987 | Substrate treatment method, computer storage medium and substrate treatment system | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita, Shinichiro KAWAKAMI, Takashi Yamauchi | 2017-11-07 |
| 9741583 | Substrate treatment method, computer readable storage medium and substrate treatment system | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita, Gen You | 2017-08-22 |