Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810987 | Substrate treatment method, computer storage medium and substrate treatment system | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita, Takanori Nishi, Takashi Yamauchi | 2017-11-07 |
| 9748100 | Substrate processing method, storage medium and substrate processing system | Tomonori Esaki, Takashi Yamauchi | 2017-08-29 |