Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9820352 | Output circuit | — | 2017-11-14 |
| 9810987 | Substrate treatment method, computer storage medium and substrate treatment system | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita, Takanori Nishi, Shinichiro KAWAKAMI | 2017-11-07 |
| 9748100 | Substrate processing method, storage medium and substrate processing system | Tomonori Esaki, Shinichiro KAWAKAMI | 2017-08-29 |