Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9662685 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Gentaro Goshi, Kazuyuki Mitsuoka, Gen You, Takehiko Orii, Takayuki Toshima | 2017-05-30 |
| 9583330 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato +5 more | 2017-02-28 |