Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748101 | Substrate treatment method, computer storage medium, and substrate treatment system | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita, Soichiro Okada | 2017-08-29 |
| 9618849 | Pattern forming method, pattern forming apparatus, and computer readable storage medium | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita | 2017-04-11 |