Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9797067 | Selective epitaxial growth method and film forming apparatus | Daisuke Suzuki, Satoshi Onodera | 2017-10-24 |
| 9777366 | Thin film forming method | Atsushi Endo, Takahiro Miyahara, Shigeru Nakajima, Satoshi Takagi, Kazumasa Igarashi | 2017-10-03 |
| 9758865 | Silicon film forming method, thin film forming method and cross-sectional shape control method | Kazuhide Hasebe, Kazuya Takahashi, Katsuhiko Komori, Yoshikazu Furusawa, Mitsuhiro Okada +1 more | 2017-09-12 |
| 9646879 | Depression filling method and processing apparatus | Youichirou Chiba, Takumi YAMADA, Daisuke Suzuki | 2017-05-09 |