Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9758865 | Silicon film forming method, thin film forming method and cross-sectional shape control method | Kazuya Takahashi, Katsuhiko Komori, Yoshikazu Furusawa, Mitsuhiro Okada, Hiroyuki Hayashi +1 more | 2017-09-12 |
| 9613838 | Batch-type vertical substrate processing apparatus and substrate holder | Mitsuhiro Okada | 2017-04-04 |