Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9758865 | Silicon film forming method, thin film forming method and cross-sectional shape control method | Kazuhide Hasebe, Kazuya Takahashi, Katsuhiko Komori, Mitsuhiro Okada, Hiroyuki Hayashi +1 more | 2017-09-12 |
| 9540743 | Amorphous silicon crystallizing method, crystallized silicon film forming method, semiconductor device manufacturing method and film forming apparatus | Kazuya Takahashi, Mitsuhiro Okada, Hiromasa YONEKURA | 2017-01-10 |