Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9540743 | Amorphous silicon crystallizing method, crystallized silicon film forming method, semiconductor device manufacturing method and film forming apparatus | Kazuya Takahashi, Yoshikazu Furusawa, Mitsuhiro Okada | 2017-01-10 |