Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798317 | Substrate processing method and control apparatus | Yuichi Takenaga | 2017-10-24 |
| 9799577 | Heat treatment system, heat treatment method, and program | Yuichi Takenaga, Daisuke Suzuki | 2017-10-24 |
| 9758865 | Silicon film forming method, thin film forming method and cross-sectional shape control method | Kazuhide Hasebe, Kazuya Takahashi, Yoshikazu Furusawa, Mitsuhiro Okada, Hiroyuki Hayashi +1 more | 2017-09-12 |
| 9558940 | Method and apparatus for forming silicon film | — | 2017-01-31 |