Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798317 | Substrate processing method and control apparatus | Katsuhiko Komori | 2017-10-24 |
| 9799577 | Heat treatment system, heat treatment method, and program | Daisuke Suzuki, Katsuhiko Komori | 2017-10-24 |
| 9772624 | Control apparatus, substrate processing apparatus, and substrate processing system | Takanori Saito | 2017-09-26 |
| 9543675 | Board-to-board connector assembly and connector | Hiroaki Obikane, Takayuki Nishimura | 2017-01-10 |