Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9777366 | Thin film forming method | Akinobu Kakimoto, Atsushi Endo, Takahiro Miyahara, Satoshi Takagi, Kazumasa Igarashi | 2017-10-03 |
| 9758867 | Method of controlling gas supply apparatus and substrate processing system | Hiromi Shima, Yusuke TACHINO | 2017-09-12 |