Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9758867 | Method of controlling gas supply apparatus and substrate processing system | Shigeru Nakajima, Yusuke TACHINO | 2017-09-12 |
| 9748065 | Sealed contact device | Masaki Mori, Takuma Okamoto | 2017-08-29 |
| 9640448 | Film forming method, film forming apparatus, and storage medium | Hiroaki Ikegawa, Yusuke TACHINO | 2017-05-02 |
| 9552948 | Sealed contact device and method of manufacturing the same | Masaki Mori, Takuma Okamoto | 2017-01-24 |