Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9758867 | Method of controlling gas supply apparatus and substrate processing system | Shigeru Nakajima, Hiromi Shima | 2017-09-12 |
| 9640448 | Film forming method, film forming apparatus, and storage medium | Hiroaki Ikegawa, Hiromi Shima | 2017-05-02 |