Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9803282 | Vapor phase growth apparatus | Yuusuke Sato | 2017-10-31 |
| 9735003 | Film-forming apparatus and film-forming method | Yuusuke Sato | 2017-08-15 |
| 9653555 | Depression filling method and processing apparatus | Youichirou Chiba, Daisuke Suzuki | 2017-05-16 |
| 9646879 | Depression filling method and processing apparatus | Akinobu Kakimoto, Youichirou Chiba, Daisuke Suzuki | 2017-05-09 |
| 9624603 | Vapor phase growth apparatus having shower plate with multi gas flow passages and vapor phase growth method using the same | Yuusuke Sato | 2017-04-18 |
| 9546435 | Vapor phase growth apparatus and vapor phase growth method | Yuusuke Sato | 2017-01-17 |