Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9803282 | Vapor phase growth apparatus | Takumi YAMADA | 2017-10-31 |
| D798250 | Heater | Hiroshi Furutani | 2017-09-26 |
| D797690 | Heater for semiconductor manufacturing apparatus | Hiroshi Furutani | 2017-09-19 |
| 9735003 | Film-forming apparatus and film-forming method | Takumi YAMADA | 2017-08-15 |
| 9624603 | Vapor phase growth apparatus having shower plate with multi gas flow passages and vapor phase growth method using the same | Takumi YAMADA | 2017-04-18 |
| 9546435 | Vapor phase growth apparatus and vapor phase growth method | Takumi YAMADA | 2017-01-17 |