Issued Patents 2017
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9576814 | Method of spacer patterning to form a target integrated circuit pattern | Chieh-Han Wu, Cheng-Hsiung Tsai, Chung-Ju Lee, Ming-Feng Shieh, Ru-Gun Liu +1 more | 2017-02-21 |
| 9568677 | Waveguide structure and method for fabricating the same | Chun-Hao Tseng, Ying-Hao Kuo, Hai-Ching Chen | 2017-02-14 |
| 9570305 | Self-aligned double patterning | Yu-Sheng Chang, Chung-Ju Lee | 2017-02-14 |
| 9564397 | Interconnect structure and method of forming the same | Cheng-Hsiung Tsai, Chung-Ju Lee, Hai-Ching Chen, Shau-Lin Shue | 2017-02-07 |