Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799495 | Plasma processing apparatus and plasma processing method | Bunji Miizuno, Tomohiro Okumura | 2017-10-24 |
| 9786472 | Plasma processing apparatus and method for manufacturing electronic component | Tetsuhiro Iwai, Syouzou Watanabe | 2017-10-10 |
| 9780021 | Method of manufacturing element chip, method of manufacturing electronic component-mounted structure, and electronic component-mounted structure | Atsushi Harikai, Noriyuki Matsubara | 2017-10-03 |
| 9698073 | Method of manufacturing element chip and element chip | Atsushi Harikai, Noriyuki Matsubara, Mitsuru Hiroshima, Mitsuhiro Okune | 2017-07-04 |
| 9698052 | Method of manufacturing element chip and method of manufacturing electronic component-mounted structure using plasma etch to singulate element chip | Atsushi Harikai, Noriyuki Matsubara | 2017-07-04 |
| 9620336 | Plasma processing apparatus and method therefor | — | 2017-04-11 |
| 9570272 | Plasma processing apparatus and plasma processing method | Atsushi Harikai, Noriyuki Matsubara | 2017-02-14 |