Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842750 | Plasma processing method | — | 2017-12-12 |
| 9786472 | Plasma processing apparatus and method for manufacturing electronic component | Shogo Okita, Syouzou Watanabe | 2017-10-10 |
| 9583355 | Plasma processing apparatus and plasma processing method | Nobuhiro Nishizaki, Atsushi Harikai, Mitsuru Hiroshima | 2017-02-28 |