Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779986 | Plasma treatment method and method of manufacturing electronic component | Noriyuki Matsubara, Hideo Kanou, Mitsuru Hiroshima, Syouzou Watanabe, Toshihiro Wada | 2017-10-03 |
| 9780021 | Method of manufacturing element chip, method of manufacturing electronic component-mounted structure, and electronic component-mounted structure | Shogo Okita, Noriyuki Matsubara | 2017-10-03 |
| 9698052 | Method of manufacturing element chip and method of manufacturing electronic component-mounted structure using plasma etch to singulate element chip | Shogo Okita, Noriyuki Matsubara | 2017-07-04 |
| 9698073 | Method of manufacturing element chip and element chip | Shogo Okita, Noriyuki Matsubara, Mitsuru Hiroshima, Mitsuhiro Okune | 2017-07-04 |
| 9653334 | Plasma processing apparatus and method | Noriyuki Matsubara, Mitsuru Hiroshima | 2017-05-16 |
| 9583355 | Plasma processing apparatus and plasma processing method | Nobuhiro Nishizaki, Tetsuhiro Iwai, Mitsuru Hiroshima | 2017-02-28 |
| 9570272 | Plasma processing apparatus and plasma processing method | Shogo Okita, Noriyuki Matsubara | 2017-02-14 |