Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786472 | Plasma processing apparatus and method for manufacturing electronic component | Tetsuhiro Iwai, Shogo Okita | 2017-10-10 |
| 9779986 | Plasma treatment method and method of manufacturing electronic component | Atsushi Harikai, Noriyuki Matsubara, Hideo Kanou, Mitsuru Hiroshima, Toshihiro Wada | 2017-10-03 |