Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779986 | Plasma treatment method and method of manufacturing electronic component | Atsushi Harikai, Noriyuki Matsubara, Hideo Kanou, Syouzou Watanabe, Toshihiro Wada | 2017-10-03 |
| 9698073 | Method of manufacturing element chip and element chip | Atsushi Harikai, Shogo Okita, Noriyuki Matsubara, Mitsuhiro Okune | 2017-07-04 |
| 9653334 | Plasma processing apparatus and method | Noriyuki Matsubara, Atsushi Harikai | 2017-05-16 |
| 9583355 | Plasma processing apparatus and plasma processing method | Nobuhiro Nishizaki, Atsushi Harikai, Tetsuhiro Iwai | 2017-02-28 |