Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799495 | Plasma processing apparatus and plasma processing method | Shogo Okita, Bunji Miizuno | 2017-10-24 |
| 9741538 | Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device | Satoshi SUEMASU | 2017-08-22 |
| 9691593 | Plasma processing device and plasma processing method | — | 2017-06-27 |
| 9673062 | Plasma processing method | — | 2017-06-06 |
| 9627183 | Plasma processing device, plasma processing method and method of manufacturing electronic devices | — | 2017-04-18 |
| 9601330 | Plasma processing device, and plasma processing method | Hiroshi Kawaura | 2017-03-21 |
| 9595458 | Plasma processing apparatus and method, and method of manufacturing electronic device | Satoshi SUEMASU | 2017-03-14 |
| 9583313 | Plasma processing apparatus and plasma processing method | — | 2017-02-28 |