Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741538 | Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device | Tomohiro Okumura | 2017-08-22 |
| 9595458 | Plasma processing apparatus and method, and method of manufacturing electronic device | Tomohiro Okumura | 2017-03-14 |