Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852901 | Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges | Shankar Swaminathan, Saangrut Sangplung, Frank L. Pasquale, Ted Minshall, Adrien LaVoie +2 more | 2017-12-26 |
| 9793096 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Shankar Swaminathan, Jun Qian, Chloe Baldasseroni +8 more | 2017-10-17 |