Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9761741 | Film-forming material | Kazuya Ebara, Hikaru Imamura | 2017-09-12 |
| 9753369 | Polymer-containing developer | Yasushi Sakaida, Bangching Ho | 2017-09-05 |
| 9746764 | Mask blank and transfer mask | Takahiro Hiromatsu, Masahiro Hashimoto, Yasushi Sakaida, Ryuta MIZUOCHI, Masaki Nagai | 2017-08-29 |
| 9746768 | Resist overlayer film forming composition for lithography and method for producing semiconductor device using the same | Ryuji Ohnishi, Noriaki Fujitani | 2017-08-29 |
| 9632414 | Coating liquid to be applied to resist pattern and method for forming reverse pattern | Yasushi Sakaida, Shuhei Shigaki | 2017-04-25 |
| 9627217 | Silicon-containing EUV resist underlayer film-forming composition including additive | Shuhei Shigaki, Hiroaki Yaguchi, Wataru SHIBAYAMA, Bangching Ho | 2017-04-18 |