Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9760006 | Silicon-containing resist underlayer film forming composition having urea group | Makoto Nakajima, Yuta Kanno | 2017-09-12 |
| 9725618 | Metal-containing resist underlayer film-forming composition containing polyacid | Makoto Nakajima, Hiroyuki Wakayama, Satoshi Takeda | 2017-08-08 |
| 9627217 | Silicon-containing EUV resist underlayer film-forming composition including additive | Shuhei Shigaki, Hiroaki Yaguchi, Rikimaru Sakamoto, Bangching Ho | 2017-04-18 |