Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9753369 | Polymer-containing developer | Rikimaru Sakamoto, Yasushi Sakaida | 2017-09-05 |
| 9627217 | Silicon-containing EUV resist underlayer film-forming composition including additive | Shuhei Shigaki, Hiroaki Yaguchi, Wataru SHIBAYAMA, Rikimaru Sakamoto | 2017-04-18 |