Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9753369 | Polymer-containing developer | Rikimaru Sakamoto, Bangching Ho | 2017-09-05 |
| 9746764 | Mask blank and transfer mask | Takahiro Hiromatsu, Masahiro Hashimoto, Ryuta MIZUOCHI, Rikimaru Sakamoto, Masaki Nagai | 2017-08-29 |
| 9632414 | Coating liquid to be applied to resist pattern and method for forming reverse pattern | Rikimaru Sakamoto, Shuhei Shigaki | 2017-04-25 |