Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9746764 | Mask blank and transfer mask | Takahiro Hiromatsu, Yasushi Sakaida, Ryuta MIZUOCHI, Rikimaru Sakamoto, Masaki Nagai | 2017-08-29 |
| 9651859 | Mask blank, transfer mask and method of manufacturing transfer mask | Atsushi Kominato, Hiroyuki Iwashita, Osamu Nozawa | 2017-05-16 |
| 9612527 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Osamu Nozawa | 2017-04-04 |
| 9535320 | Mask blank, method of manufacturing the same, transfer mask, and method of manufacturing the same | Kazuya Sakai | 2017-01-03 |