Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9625805 | Reflective mask blank, reflective mask and method of manufacturing reflective mask | Ryo Ohkubo, Osamu Nozawa, Toshiyuki Suzuki | 2017-04-18 |
| 9625806 | Mask blank, phase-shift mask, and method for manufacturing the same | Osamu Nozawa, Hiroaki Shishido | 2017-04-18 |
| 9535320 | Mask blank, method of manufacturing the same, transfer mask, and method of manufacturing the same | Masahiro Hashimoto | 2017-01-03 |