Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9726972 | Mask blank, transfer mask, and method for manufacturing transfer mask | Hiroaki Shishido, Ryo Ohkubo | 2017-08-08 |
| 9664997 | Method of manufacturing mask blank and method of manufacturing transfer mask | Atsushi Kominato, Hiroaki Shishido | 2017-05-30 |
| 9651859 | Mask blank, transfer mask and method of manufacturing transfer mask | Masahiro Hashimoto, Atsushi Kominato, Hiroyuki Iwashita | 2017-05-16 |
| 9625807 | Mask blank, transfer mask, method of manufacturing a mask blank, method of manufacturing a transfer mask and method of manufacturing a semiconductor device | Hiroaki Shishido, Atsushi Kominato, Toshiharu Kikuchi | 2017-04-18 |
| 9625805 | Reflective mask blank, reflective mask and method of manufacturing reflective mask | Kazuya Sakai, Ryo Ohkubo, Toshiyuki Suzuki | 2017-04-18 |
| 9625806 | Mask blank, phase-shift mask, and method for manufacturing the same | Hiroaki Shishido, Kazuya Sakai | 2017-04-18 |
| 9612527 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Masahiro Hashimoto | 2017-04-04 |