Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9726972 | Mask blank, transfer mask, and method for manufacturing transfer mask | Ryo Ohkubo, Osamu Nozawa | 2017-08-08 |
| 9664997 | Method of manufacturing mask blank and method of manufacturing transfer mask | Atsushi Kominato, Osamu Nozawa | 2017-05-30 |
| 9625806 | Mask blank, phase-shift mask, and method for manufacturing the same | Osamu Nozawa, Kazuya Sakai | 2017-04-18 |
| 9625807 | Mask blank, transfer mask, method of manufacturing a mask blank, method of manufacturing a transfer mask and method of manufacturing a semiconductor device | Atsushi Kominato, Osamu Nozawa, Toshiharu Kikuchi | 2017-04-18 |