Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9664997 | Method of manufacturing mask blank and method of manufacturing transfer mask | Hiroaki Shishido, Osamu Nozawa | 2017-05-30 |
| 9651859 | Mask blank, transfer mask and method of manufacturing transfer mask | Masahiro Hashimoto, Hiroyuki Iwashita, Osamu Nozawa | 2017-05-16 |
| 9625807 | Mask blank, transfer mask, method of manufacturing a mask blank, method of manufacturing a transfer mask and method of manufacturing a semiconductor device | Hiroaki Shishido, Osamu Nozawa, Toshiharu Kikuchi | 2017-04-18 |
| 9612527 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Masahiro Hashimoto, Osamu Nozawa | 2017-04-04 |