Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9834745 | Cleaning fluid for semiconductor, and cleaning method using the same | Suguru Sassa | 2017-12-05 |
| 9695462 | Method for evaluation of drug efficacy of a medicine having a therapeutic or preventive effect against a disease related to EL activity and a method for screening an inhibitor of EL activity | Takashi Ono, Atsuko Yamamoto | 2017-07-04 |
| 9632414 | Coating liquid to be applied to resist pattern and method for forming reverse pattern | Yasushi Sakaida, Rikimaru Sakamoto | 2017-04-25 |
| 9627217 | Silicon-containing EUV resist underlayer film-forming composition including additive | Hiroaki Yaguchi, Wataru SHIBAYAMA, Rikimaru Sakamoto, Bangching Ho | 2017-04-18 |