| 9824896 |
Methods and systems for advanced ion control for etching processes |
Zhongkui Tan, Qian Fu, Qing Xu, John Drewery |
2017-11-21 |
| 9805963 |
Electrostatic chuck with thermal choke |
Maolin Long, Alex Paterson, Quan Chau |
2017-10-31 |
| 9767991 |
Methods and systems for independent control of radical density, ion density, and ion energy in pulsed plasma semiconductor device fabrication |
Zhongkui Tan, Qian Fu, Qing Xu |
2017-09-19 |
| 9761459 |
Systems and methods for reverse pulsing |
Maolin Long, Zhongkui Tan, Qian Fu, Alex Paterson, John Drewery |
2017-09-12 |
| 9691625 |
Methods and systems for plasma etching using bi-modal process gas composition responsive to plasma power level |
Zhongkui Tan, Qian Fu, Qing Xu |
2017-06-27 |
| 9583357 |
Systems and methods for reverse pulsing |
Maolin Long, Zhongkui Tan, Qian Fu, Alex Paterson, John Drewery |
2017-02-28 |
