Issued Patents 2017
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9808903 | Method of polishing back surface of substrate and substrate processing apparatus | Yu Ishii, Kenya Ito, Masayuki Nakanishi | 2017-11-07 |
| 9808836 | Substrate processing apparatus | Kenya Ito, Yu Ishii, Keisuke Uchiyama | 2017-11-07 |
| 9782869 | Apparatus for detecting abnormality in polishing of a substrate | Masaya Seki, Hiroyuki Takenaka | 2017-10-10 |
| 9724797 | Polishing apparatus | Osamu Nabeya, Makoto Fukushima, Hozumi Yasuda | 2017-08-08 |
| 9694467 | Polishing method of polishing a substrate | Masaya Seki | 2017-07-04 |
| 9630289 | Polishing method involving a polishing member polishing at angle tangent to the substrate rotational direction | Atsushi Yoshida, Michiyoshi YAMASHITA | 2017-04-25 |
| 9604335 | Wafer polishing apparatus | Atsushi Yoshida, Toshifumi Watanabe | 2017-03-28 |
| 9566616 | Substrate processing apparatus | Kenya Ito, Yu Ishii, Keisuke Uchiyama | 2017-02-14 |
| 9561573 | Polishing apparatus | Masaya Seki | 2017-02-07 |