Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9630289 | Polishing method involving a polishing member polishing at angle tangent to the substrate rotational direction | Tetsuji Togawa, Atsushi Yoshida | 2017-04-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9630289 | Polishing method involving a polishing member polishing at angle tangent to the substrate rotational direction | Tetsuji Togawa, Atsushi Yoshida | 2017-04-25 |