Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9821429 | Polishing pad and chemical mechanical polishing apparatus for polishing a workpiece, and method of polishing a workpiece using the chemical mechanical polishing apparatus | Yu Ishii, Shozo TAKAHASHI, Mika Suzuki | 2017-11-21 |
| 9808836 | Substrate processing apparatus | Tetsuji Togawa, Yu Ishii, Keisuke Uchiyama | 2017-11-07 |
| 9808903 | Method of polishing back surface of substrate and substrate processing apparatus | Yu Ishii, Masayuki Nakanishi, Tetsuji Togawa | 2017-11-07 |
| 9751286 | Weather-resistant multilayer film | Akiko Yoda, Koji Ohguma, Mikio Yamahiro | 2017-09-05 |
| 9738483 | Tape sticking apparatus and tape sticking method | Keisuke Uchiyama, Tomiichi Matsui, Mahito SHIBUYA | 2017-08-22 |
| 9566616 | Substrate processing apparatus | Tetsuji Togawa, Yu Ishii, Keisuke Uchiyama | 2017-02-14 |
| D777546 | Work holder for polishing apparatus | Yu Ishii, Hirohiko Ueda | 2017-01-31 |