| 9821429 |
Polishing pad and chemical mechanical polishing apparatus for polishing a workpiece, and method of polishing a workpiece using the chemical mechanical polishing apparatus |
Yu Ishii, Shozo TAKAHASHI, Mika Suzuki |
2017-11-21 |
| 9808836 |
Substrate processing apparatus |
Tetsuji Togawa, Yu Ishii, Keisuke Uchiyama |
2017-11-07 |
| 9808903 |
Method of polishing back surface of substrate and substrate processing apparatus |
Yu Ishii, Masayuki Nakanishi, Tetsuji Togawa |
2017-11-07 |
| 9751286 |
Weather-resistant multilayer film |
Akiko Yoda, Koji Ohguma, Mikio Yamahiro |
2017-09-05 |
| 9738483 |
Tape sticking apparatus and tape sticking method |
Keisuke Uchiyama, Tomiichi Matsui, Mahito SHIBUYA |
2017-08-22 |
| 9566616 |
Substrate processing apparatus |
Tetsuji Togawa, Yu Ishii, Keisuke Uchiyama |
2017-02-14 |
| D777546 |
Work holder for polishing apparatus |
Yu Ishii, Hirohiko Ueda |
2017-01-31 |