Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9808903 | Method of polishing back surface of substrate and substrate processing apparatus | Yu Ishii, Kenya Ito, Tetsuji Togawa | 2017-11-07 |
| 9666440 | Polishing apparatus and polishing method | Kenji Kodera, Nobuhiro Yanaka | 2017-05-30 |