Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850591 | High purity aluminum top coat on substrate | Jennifer Y. Sun | 2017-12-26 |
| 9610591 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye +1 more | 2017-04-04 |
| 9597734 | Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof | Jennifer Y. Sun, Ren-Guan Duan | 2017-03-21 |