LC

Lee Chen

TL Tokyo Electron Limited: 6 patents #11 of 744Top 2%
US University Of Houston System: 1 patents #11 of 87Top 15%
Overall (2017): #20,185 of 506,227Top 4%
6
Patents 2017

Issued Patents 2017

Showing 1–6 of 6 patents

Patent #TitleCo-InventorsDate
9852893 Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus Demetre J. Economou, Jianping Zhao, Merritt Funk 2017-12-26
9799494 Energetic negative ion impact ionization plasma Merritt Funk 2017-10-24
9793095 Microwave surface-wave plasma device Merritt Funk, Jianping Zhao, Toshihiko Iwao, Toshihisa Nozawa, Zhiying Chen +1 more 2017-10-17
9728416 Plasma tuning rods in microwave resonator plasma sources Jianping Zhao, Merritt Funk, Iwao Toshihiko, Peter L. G. Ventzek 2017-08-08
9697993 Non-ambipolar plasma ehncanced DC/VHF phasor Zhiying Chen 2017-07-04
9668332 Method and apparatus for providing an anisotropic and mono-energetic neutral beam by non-ambipolar electron plasma Merritt Funk, Zhiying Chen 2017-05-30