Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9838735 | Prevention of erroneous detection of signal | Hiroyuki Kamata, Takuya Okamoto | 2017-12-05 |
| 9786532 | Substrate processing apparatus and method of transferring a substrate | Toshio Yokoyama, Masahiko Sekimoto, Kenichi Akazawa, Takashi Mitsuya, Keiichi Kurashina | 2017-10-10 |
| 9687957 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Hiroshi Sotozaki +5 more | 2017-06-27 |
| 9608271 | Positive electrode active material for non-aqueous electrolyte secondary battery | Tomooki Kawasaki | 2017-03-28 |