Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9822461 | Dynamic current distribution control apparatus and method for wafer electroplating | Zhian He, David W. Porter, Frederick Dean Wilmot | 2017-11-21 |
| 9816193 | Configuration and method of operation of an electrodeposition system for improved process stability and performance | Kousik Ganesan, Tighe A. Spurlin, Shantinath Ghongadi, Andrew John McKerrow, James E. Duncan | 2017-11-14 |
| 9816194 | Control of electrolyte flow dynamics for uniform electroplating | Zhian He, Jian Zhou, Jingbin Feng, Shantinath Ghongadi | 2017-11-14 |
| 9816196 | Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte | Tighe A. Spurlin, Charles Merrill, Ludan Huang, Matthew Thorum, Lee J. Brogan +9 more | 2017-11-14 |
| 9777386 | Chemistry additives and process for cobalt film electrodeposition | Natalia V. Doubina, Matthew A. Rigsby | 2017-10-03 |