Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816193 | Configuration and method of operation of an electrodeposition system for improved process stability and performance | Tighe A. Spurlin, Jonathan D. Reid, Shantinath Ghongadi, Andrew John McKerrow, James E. Duncan | 2017-11-14 |
| 9685353 | Apparatus and method for edge bevel removal of copper from silicon wafers | Shantinath Ghongadi, Tariq Majid, Aaron Louis LaBrie, Steven T. Mayer | 2017-06-20 |