Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685353 | Apparatus and method for edge bevel removal of copper from silicon wafers | Kousik Ganesan, Shantinath Ghongadi, Aaron Louis LaBrie, Steven T. Mayer | 2017-06-20 |
| 9677190 | Membrane design for reducing defects in electroplating systems | Doyeon KIM, Shantinath Ghongadi, Yuichi Takada, Ludan Huang | 2017-06-13 |